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LI-QUID LIQUID INTERNATIONAL 利奎德国际 · Shanghai
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洁净工作台(洁净室设备)

Clean Benches

Model No. CLB-0003 · Cleanroom Equipment

ULPA Clean Bench for Semiconductor and Optics

半导体和光学用 ULPA 洁净工作台

Wafer handling, photomask inspection and precision optics assembly are sensitive to particles finer than HEPA targets. This bench uses U15 ULPA filters at 99.9995% or better to reach ISO 4–5, with vertical or horizontal flow at 0.3 to 0.4 m/s driven by a variable-speed EC fan.

Filter grade
U15 ULPA, ≥ 99.9995 %
Cleanliness class
ISO 4–5
Air velocity
0.3–0.4 m/s
Airflow direction
Vertical or horizontal
Work-zone width
900–1500 mm
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Packing & Shipping

Place of originChina (dispatched from Shanghai)
BrandLiquid International / OEM on request
Export packingFumigation-free plywood case or reinforced carton
Loading portShanghai / Ningbo (others on request)
Payment termsT/T, L/C at sight (confirmed on quotation)
Trade termsEXW, FOB, CFR, CIF, DAP

Typical export terms — final terms are confirmed on the proforma invoice.

Product Description 产品描述

Wafer handling, photomask inspection and precision optics assembly are sensitive to particles finer than HEPA targets. This bench uses U15 ULPA filters at 99.9995% or better to reach ISO 4–5, with vertical or horizontal flow at 0.3 to 0.4 m/s driven by a variable-speed EC fan.

Highlights

  • Illuminance of 600 lux or more for inspection.
  • Noise at or below 60 dB(A).
  • Work zone 900–1500 mm wide.
  • Suits MEMS packaging.

Applications

  • Wafer handling
  • Photomask inspection
  • Precision optics assembly
  • MEMS device packaging

Specifications 技术参数

ParameterValue
Filter grade 过滤器等级 U15 ULPA, ≥ 99.9995 %
Cleanliness class 洁净度等级 ISO 4–5
Air velocity 风速 0.3–0.4 m/s
Airflow direction 气流方向 Vertical or horizontal
Work-zone width 工作区宽度 900–1500 mm
Fan type 风机类型 EC, variable speed
Noise level 噪声 ≤ 60 dB(A)
Illuminance 照度 ≥ 600 lux
Power supply 电源 220 V, 50 Hz, 300–700 W
Work surface 工作面 304 or 316 stainless steel
Model No.CLB-0003
Place of originChina (dispatched from Shanghai)

Applicable standards 适用标准

ISO 14644-1 (cleanroom classification) ISO 14644-3 (test methods) ISO 14644-4 (design and construction) IEST-RP-CC002 (unidirectional flow devices) JG/T 292 (clean bench) GB/T 25915.1 EN 1822 (HEPA and ULPA filters)

Chinese national standards (GB/T, JJG) and international standards referenced for this product type. Test reports and certificates are supplied with the quotation on request.

Packing & Shipping 包装与运输

Export packing

Fumigation-free plywood case or reinforced carton

Every unit is power-tested before packing; enclosed in shock foam and moisture barrier; wooden cases comply with ISPM 15.

Loading port

Shanghai / Ningbo (others on request)

Full container load (FCL), less-than-container load (LCL) or air freight; complete export documentation provided.

Inquiry Now 索取报价

Complete the form below — an export engineer will send technical configurations and a formal proforma invoice within 24 hours.

Products in this inquiry: ULPA Clean Bench for Semiconductor and Optics (CLB-0003)

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