真空腔体
Vacuum Chambers
Photo for reference; configuration may vary by order.
Model No. VAC-0003 · Vacuum Equipment
Vacuum Coating Chamber
真空镀膜腔体
Research groups prototyping optical films or conductive layers need a chamber built around their process. This coating chamber works at 10⁻³–10⁻⁷ mbar in 20–500 L of 304 or 316L, with CF or ISO KF flanges, 1–4 sputtering targets, a rotating or heated stage, 1–3 view ports and quartz crystal thickness monitoring. Send your process layout.
- Working pressure
- 10⁻³–10⁻⁷ mbar
- Chamber volume
- 20–500 L
- Material
- Stainless steel 304 or 316L
- Flange standard
- CF or ISO KF
- Substrate stage
- Rotating or heated
Packing & Shipping
| Place of origin | China (dispatched from Shanghai) |
|---|---|
| Brand | Liquid International / OEM on request |
| Export packing | Fumigation-free plywood case or reinforced carton |
| Loading port | Shanghai / Ningbo (others on request) |
| Payment terms | T/T, L/C at sight (confirmed on quotation) |
| Trade terms | EXW, FOB, CFR, CIF, DAP |
Typical export terms — final terms are confirmed on the proforma invoice.
Product Description 产品描述
Research groups prototyping optical films or conductive layers need a chamber built around their process. This coating chamber works at 10⁻³–10⁻⁷ mbar in 20–500 L of 304 or 316L, with CF or ISO KF flanges, 1–4 sputtering targets, a rotating or heated stage, 1–3 view ports and quartz crystal thickness monitoring. Send your process layout.
Highlights
- 1–4 sputtering target positions
- Rotating or heated substrate stage
- Quartz crystal thickness monitor
- CF or ISO KF flanges
Applications
- Sputter and evaporation coating
- Optical thin films
- Conductive and barrier layers
- Research prototype deposition
- Small-batch production coating
Specifications 技术参数
| Parameter | Value |
|---|---|
| Working pressure 工作压力 | 10⁻³–10⁻⁷ mbar |
| Chamber volume 腔体容积 | 20–500 L |
| Material 材料 | Stainless steel 304 or 316L |
| Flange standard 法兰标准 | CF or ISO KF |
| Substrate stage 基板台 | Rotating or heated |
| Targets 靶材 | 1–4 sputtering targets |
| View ports 观察窗 | 1–3 |
| Thickness monitor 膜厚监测 | Quartz crystal |
| Load lock 装载锁 | Optional |
| Cooling 冷却 | Water-cooled shields |
| Model No. | VAC-0003 |
| Place of origin | China (dispatched from Shanghai) |
Applicable standards 适用标准
IEC 61010-1
ISO 21360
ISO 27893
ISO 9001
GB 4793.1
Chinese national standards (GB/T, JJG) and international standards referenced for this product type. Test reports and certificates are supplied with the quotation on request.
Packing & Shipping 包装与运输
Export packing
Fumigation-free plywood case or reinforced carton
Every unit is power-tested before packing; enclosed in shock foam and moisture barrier; wooden cases comply with ISPM 15.
Loading port
Shanghai / Ningbo (others on request)
Full container load (FCL), less-than-container load (LCL) or air freight; complete export documentation provided.
Inquiry Now 索取报价
Complete the form below — an export engineer will send technical configurations and a formal proforma invoice within 24 hours.
Related products
6 models
Model No. VAC-0002
Vacuum Drying Oven Chamber真空干燥箱腔体
- Temperature range
- 40–200 °C
- Temperature uniformity
- ± 1–2 °C
Model No. VAM-0004
Multi-Port Vacuum Distribution Manifold多接口真空分配歧管
- Number of branches
- 4–12 or more
- Header bore
- 15–40 mm
Model No. VPU-0004
Water-Ring Vacuum Pump水环真空泵
- Ultimate pressure
- 30–50 mbar at 15 °C water
- Pumping speed
- 25–600 m3/h